COLLABORATIVE ROBOTIC SOLUTION FOR LASER MICROMACHINING (CORS)

Name of demonstration

Main objective

To achieve micron accuracy automation solution for wafer sample placement

Short description

We have built a proof of concept, proving that even femtosecond fabrication processes requiring micron accuracy can be automated given the right tools. A collaborative manipulator arm working in tandem with machine vision technologies can achieve sub-micron accuracy required for precise sample allignment

This demonstration has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 825196.

Responsible person

PhD Gintare Grybauskaite-Kaminskiene – R&I Project Manager

gintare.kaminskiene@wophotonics.com

NACE

C28 - Manufacture of machinery and equipment n.e.c.

Keywords

Industry 4.0, automation, robotics and automation.

Benefits for the users

Automation of sample placement for femtosecond fabrication / remote monitoring

Innovation

Automation of sample placement for femtosecond fabrication / remote monitoring

Risks and limitations

a. Risk – not a stable system b. Limitations – each different fabrication must be coded separately

Technology readiness level

7 - System model in operational environment

Sectors of application

Femtosecond fabrication (job shop production).

Potential sectors of application

Femtosecond fabrication mass production process

Hardware / Software

Hardware:

Aerotech controller; Aerotech XY Stage; Frame; Z Axis with camera assembly; IDS camera with 10x objective; ABB GoFa™ CRB 15000 colaborative robot; ABB controller; GoFa™ CRB 15000 compatible wafer gripper;Wafer casette; Laser sensor for wafer position and count; Industrial grade windows PC

Software:

SCA laser fabrication system control software;Single software solution responsible for the whole process (machine vision, stage movement, robot control, recording of results); SCAApp,Mobile software designed for remote monitoring and control; ABB Robot Studio, Software to create robot programs and behaviours to be initiated by SCA; Aerotech/IDS drivers, Drivers required to enable communication with corresponding hardware

Photos

Femtosecond laser with robot designed by WOP’s Laser Systems Engineer

Wafer carrier interface designed by WOP’s Laser Systems Engineer and wafer itself

Video

Workshop of Photonics, in collaboration with ABB AS, under the TRINITY Robotics DIHs project, has developed a complete robotized laser micro-micromachining workstation based on the collaborative robotic solution with the integration of machine vision and custom software.

https://www.linkedin.com/feed/update/urn:li:activity:6976150993780535297

No modules assigned

Trainings

To learn more about the solution, click on the link below to access the training on the Moodle platform
Collaborative robotic solution for laser micromachining